Planar MEMS Van de Graaff Generator

نویسنده

  • Angel V. Peterchev
چکیده

This paper discusses a MEMS implementation of a planar Van de Graaff generator in a standard MUMPs process. The ability to generate high voltages in autonomous MEMS devices may be useful in various applications such as Smart Dust [1].

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تاریخ انتشار 2001